Research
Advanced Mechatronics Laboratory
High Precision Machines
Ultra-precision machines with nano-level accuracy are the state-of-the-art technology of the mechatronics system. In our laboratory, we develop high-precision systems that are required in various industries such as stages or weighing systems optimally for each application.
High-precision motion stages
- Ultra-precision stages for cutting-edge manufacturing such as semiconductors/displays
- Optimal mechanism design in consideration of actuator or sensor characteristics
- Precision control system design for high bandwidth and multi degrees of freedom control
High-precision mass measurement system
Magnetically levitated weighing system
- Extremely low negative stiffness : improves weighing sensitivity and helps the system settle rapidly
- Gravity compensation ability : Compensates system dead-weight while maintaining low stiffness
- High ruggedness : do not fracture from overweight or impacts from external environment
Ultra-precision weighing cell for Kibble Balance
- Weighing cell unit for KRISS Kibble Balance
- Axis Symmetric structure with double parallelogram and lever amplification mechanism
- Insensitive to parasitic forces and ground tilt : improves measurement accuracy
